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1

A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits

Priya, Shashank, Song, Hyun-Cheol, Zhou, Yuan, Varghese, Ronnie, Chopra, Anuj, Kim, Sang-Gook, Kanno, Isaku, Wu, Liao, Ha, Dong Sam, Ryu, Jungho, Polcawich, Ronald G.

Journal:

Energy Harvesting and Systems

Year:

2017

Language:

english

File:

PDF, 6.96 MB

english, 2017

2

Multi-Degree-of-Freedom Thin-Film PZT-Actuated Microrobotic Leg

Rhee, Choong-Ho, Pulskamp, Jeffrey S., Polcawich, Ronald G., Oldham, Kenn R.

Journal:

Journal of Microelectromechanical Systems

Year:

2012

Language:

english

File:

PDF, 1.41 MB

english, 2012

3

Effects of DC Bias Tuning on Air-Coupled PZT Piezoelectric Micromachined Ultrasonic Transducers

Kusano, Yuri, Wang, Qi, Luo, Guo-Lun, Lu, Yipeng, Rudy, Ryan Q., Polcawich, Ronald G., Horsley, David A.

Journal:

Journal of Microelectromechanical Systems

Year:

2018

Language:

english

File:

PDF, 3.92 MB

english, 2018

4

Deformation behavior of nanograined platinum films

A.L. Romasco, L.H. Friedman, L. Fang, R.A. Meirom, T.E. Clark, R.G. Polcawich, J.S. Pulskamp, M. Dubey, C.L. Muhlstein

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 909 KB

english, 2010

5

Thin-Film Piezoelectric-on-Silicon Resonant Transformers

Bedair, Sarah S., Pulskamp, Jeffrey S., Polcawich, Ronald G., Morgan, Brian, Martin, Joel L., Power, Brian

Journal:

Journal of Microelectromechanical Systems

Year:

2013

Language:

english

File:

PDF, 8.85 MB

english, 2013

6

Millimeter-Scale Traveling Wave Rotary Ultrasonic Motors

Rudy, Ryan Q., Smith, Gabriel L., DeVoe, Don L., Polcawich, Ronald G.

Journal:

Journal of Microelectromechanical Systems

Year:

2015

Language:

english

File:

PDF, 2.09 MB

english, 2015

7

Characterization of IrO x sputtering for IrO 2 and IrO 2 /Pt bottom-electrode piezoelectric micro-electro-mechanical systems applications

Potrepka, Daniel M., Rivas, Manuel, Yu, Haibo, Polcawich, Ronald G., Aindow, Mark, Fox, Glen R.

Journal:

Thin Solid Films

Year:

2017

Language:

english

File:

PDF, 1.99 MB

english, 2017

8

Strain Measurements of Silicon Dioxide Microspecimens by Digital Imaging Processing

W. N. Sharpe, J. Pulskamp, D. S. Gianola, C. Eberl, R. G. Polcawich, R. J. Thompson

Journal:

Experimental Mechanics

Year:

2007

Language:

english

File:

PDF, 664 KB

english, 2007

9

Experimental Investigation of Strain Rate Dependence of Nanocrystalline Pt Films

K. N. Jonnalagadda, I. Chasiotis, S. Yagnamurthy, J. Lambros, J. Pulskamp, R. Polcawich, M. Dubey

Journal:

Experimental Mechanics

Year:

2010

Language:

english

File:

PDF, 499 KB

english, 2010

10

A Hybrid Experimental/Numerical Investigation of the Response of Multilayered MEMS Devices to Dynamic Loading

J. Kimberley, J. Lambros, I. Chasiotis, J. Pulskamp, R. Polcawich, M. Dubey

Journal:

Experimental Mechanics

Year:

2010

Language:

english

File:

PDF, 774 KB

english, 2010

11

Electrode-shaping for the excitation and detection of permitted arbitrary modes in arbitrary geometries in piezoelectric resonators

Pulskamp, J.S., Bedair, S.S., Polcawich, R.G., Smith, G.L., Martin, J., Power, B., Bhave, S.A.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2012

Language:

english

File:

PDF, 3.93 MB

english, 2012

12

Integrated thin-film piezoelectric traveling wave ultrasonic motors

Gabriel L. Smith, Ryan Q. Rudy, Ronald G. Polcawich, Don L. DeVoe

Journal:

Sensors and Actuators A: Physical

Year:

2012

Language:

english

File:

PDF, 2.06 MB

english, 2012

13

PZT transduction of high-overtone contour- mode resonators

Chandrahalim, H., Bhave, S.A., Polcawich, R.G., Pulskamp, J.S., Kaul, R.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2010

Language:

english

File:

PDF, 920 KB

english, 2010

14

Development of a PZT MEMS Switch Architecture for Low-Power Digital Applications

Proie, Robert M., Polcawich, Ronald G., Pulskamp, Jeffrey S., Ivanov, Tony, Zaghloul, Mona E.

Journal:

Journal of Microelectromechanical Systems

Year:

2011

Language:

english

File:

PDF, 1.14 MB

english, 2011

15

Mechanical and Ferroelectric Behavior of PZT-Based Thin Films

Yagnamurthy, Sivakumar, Chasiotis, Ioannis, Lambros, John, Polcawich, Ronald G., Pulskamp, Jeffrey S., Dubey, Madan

Journal:

Journal of Microelectromechanical Systems

Year:

2011

Language:

english

File:

PDF, 715 KB

english, 2011

16

Radioisotope Thin-Film Fueled Microfabricated Reciprocating Electromechanical Power Generator

Duggirala, R., Polcawich, R.G., Dubey, M., Lal, A.

Journal:

Journal of Microelectromechanical Systems

Year:

2008

Language:

english

File:

PDF, 1.74 MB

english, 2008

17

Thin-Film PZT Lateral Actuators With Extended Stroke

Oldham, K.R., Pulskamp, J.S., Polcawich, R.G., Dubey, M.

Journal:

Journal of Microelectromechanical Systems

Year:

2008

Language:

english

File:

PDF, 1.24 MB

english, 2008

18

Reduced-Size Low-Voltage RF MEMS X-Band Phase Shifter Integrated on Multilayer Organic Package

Chung, David J., Polcawich, Ronald G., Pulskamp, Jeffrey S., Papapolymerou, John

Journal:

IEEE Transactions on Components Packaging and Manufacturing Technology

Year:

2012

Language:

english

File:

PDF, 1.10 MB

english, 2012

19

[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Nano-electromechanical storage element for a low power complimentary logic architecture using PZT relays

Proie, Robert M., Polcawich, Ronald G., Pulskamp, Jeffrey S., Ivanov, Tony, Zaghloul, Mona

Year:

2011

Language:

english

File:

PDF, 1.02 MB

english, 2011

20

PZT MEMS for an Extremely Sensitive Magnetometer

Zakar, Eugene, Polcawich, Ronald, Dubey, Madan, Pulskamp, Jeff, Wickenden, Alma, Conrad, John, Piekarz, Richard, Wickenden, Dennis, Champion, John

Journal:

Integrated Ferroelectrics

Year:

2003

Language:

english

File:

PDF, 244 KB

english, 2003

21

Reactive ion etching of sol-gel deposited lead zirconate titanate (pzt) thin films in sf 6 plasmas

McLane, George, Polcawich, Ronald, Pulskamp, Jeffrey, Piekarski, Brett, Dubey, Madan, Zakar, Eugene, Conrad, John, Piekarz, Richard, Ervin, Matthew, Wood, Mark

Journal:

Integrated Ferroelectrics

Year:

2001

Language:

english

File:

PDF, 649 KB

english, 2001

22

Design and Fabrication of a Lead Zirconate Titanate (PZT) Thin Film Acoustic Sensor

Polcawich, R. G., Scanlon, M., Pulskamp, J., Clarkson, J., Conrad, J., Washington, D., Piekarz, R., Trolier-McKinstry, S., Dubey, M.

Journal:

Integrated Ferroelectrics

Year:

2003

Language:

english

File:

PDF, 320 KB

english, 2003

23

THIN-FILM PIEZOELECTRIC ACTUATORS FOR BIO-INSPIRED MICRO-ROBOTIC APPLICATIONS

OLDHAM, KENN, PULSKAMP, JEFFREY, POLCAWICH, RONALD, RANADE, PRASHANT, DUBEY, MADAN

Journal:

Integrated Ferroelectrics

Year:

2007

Language:

english

File:

PDF, 1.43 MB

english, 2007

24

Sol-Gel PZT for MEMS Applications

Piekarski, Brett, Dubey, Madan, Zakar, Eugene, Polcawich, Ronald, Devoe, Don, Wickenden, Dennis

Journal:

Integrated Ferroelectrics

Year:

2002

Language:

english

File:

PDF, 1.14 MB

english, 2002

25

Velocity-Dependent Fatigue Crack Paths in Nanograined Pt Films

Meirom, R. A., Clark, T., Polcawich, R., Pulskamp, J., Dubey, M., Muhlstein, C. L.

Journal:

Physical Review Letters

Year:

2008

Language:

english

File:

PDF, 578 KB

english, 2008

26

Texture control in lead zirconate titanate multilayer thin films

Sanchez, Luz, Grobicki, Alden, Smith, Gabriel, Pulskamp, Jeffrey, Takeuchi, Ichiro, Polcawich, Ronald

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2014

Language:

english

File:

PDF, 7.30 MB

english, 2014

27

Fabrication and testing of a PZT thin film high-pressure sensor

Zakar, Eugene, Polcawich, Ronald, Dubey, Madan, Piekarski, Brett, Mclane, G., Conrad, John, Piekarz, Richard, Wickenden, Dennis, Champion, John, D'Amico, William, Hollis, Michael S. L., Mcmullen, Kenn

Journal:

Integrated Ferroelectrics

Year:

2001

Language:

english

File:

PDF, 611 KB

english, 2001

28

SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Orlando, Florida (Monday 5 April 2010)] Micro- and Nanotechnology Sensors, Systems, and Applications II - Power considerations for MAST platforms

Morgan, Brian, George, Thomas, Islam, M. Saif, Bedair, Sarah, Pulskamp, Jeffrey S., Dutta, Achyut K., Polcawich, Ronald G., Meyer, Christopher, Dougherty, Christopher, Lin, Xue, Arnold, David, Bashiru

Year:

2010

Language:

english

File:

PDF, 1.87 MB

english, 2010

29

Total Ionizing Dose Effects on Piezoelectric Thin-Film Cantilevers With Oxide Electrodes

Rudy, Ryan Q., Grove, Kyle M., Rivas, Manuel, Guerrier, Jonathon, Cress, Cory, Benoit, Robert R., Jones, Jacob L., Glaser, Evan, Brewer, Steven, Bassiri-Gharb, Nazanin, Polcawich, Ronald G.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2017

Language:

english

File:

PDF, 1.98 MB

english, 2017

30

Advances in piezoelectric PZT-based RF MEMS components and systems

Benoit, R R, Rudy, R Q, Pulskamp, J S, Polcawich, R G, Bedair, S S

Journal:

Journal of Micromechanics and Microengineering

Year:

2017

Language:

english

File:

PDF, 3.82 MB

english, 2017

31

Boosting MEMS Piezoelectric Transformer Figures of Merit via Architecture Optimization

Bedair, Sarah S., Pulskamp, Jeffrey S., Rudy, Ryan, Polcawich, Ronald, Cable, Ryan, Griffin, Lee

Journal:

IEEE Electron Device Letters

Year:

2018

Language:

english

File:

PDF, 703 KB

english, 2018

32

Rapid Harmonic Analysis of Piezoelectric MEMS Resonators

Puder, Jonathan M., Pulskamp, Jeffrey S., Rudy, Ryan Q., Cassella, Cristian, Rinaldi, Matteo, Chen, Guofeng, Bhave, Sunil A., Polcawich, Ronald G.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2018

Language:

english

File:

PDF, 1023 KB

english, 2018

33

Growth of Thin Film Ferroelectric PZT, PHT, and Antiferroelectric PHO from Atomic Layer Deposition Precursors

Strnad, Nicholas A., Hanrahan, Brendan, Potrepka, Daniel M., Pulskamp, Jeffrey S., Phaneuf, Raymond J., Polcawich, Ronald G.

Journal:

Journal of the American Ceramic Society

Year:

2020

File:

PDF, 17.85 MB

2020

34

Fatigue-induced grain coarsening in nanocrystalline platinum films

Roi A. Meirom, Daan Hein Alsem, Amber L. Romasco, Trevor Clark, Ronald G. Polcawich, Jeffrey S. Pulskamp, Madan Dubey, Robert O. Ritchie, Christopher L. Muhlstein

Journal:

Acta Materialia

Year:

2011

Language:

english

File:

PDF, 978 KB

english, 2011

35

Mechanics of energy transfer and failure of ductile microscale beams subjected to dynamic loading

J. Kimberley, J. Lambros, I. Chasiotis, J. Pulskamp, R. Polcawich, M. Dubey

Journal:

Journal of the Mechanics and Physics of Solids

Year:

2010

Language:

english

File:

PDF, 1.01 MB

english, 2010

36

Modeling and Optimal Low-Power On–Off Control of Thin-Film Piezoelectric Rotational Actuators

Edamana, B., Hahn, B., Pulskamp, J.S., Polcawich, R.G., Oldham, K.

Journal:

IEEE/ASME Transactions on Mechatronics

Year:

2011

Language:

english

File:

PDF, 1.30 MB

english, 2011

37

[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - PZT MEMS Actuated Flapping Wings for Insect-Inspired Robotics

Bronson, J.R., Pulskamp, J.S., Polcawich, R.G., Kroninger, C.M., Wetzel, E.D.

Year:

2009

Language:

english

File:

PDF, 8.63 MB

english, 2009

38

Pt/TiO2 Growth Templates for Enhanced PZT films and MEMS Devices

Potrepka, Daniel M., Fox, Glen R., Sanchez, Luz M., Polcawich, Ronald G.

Journal:

MRS Proceedings

Year:

2011

Language:

english

File:

PDF, 912 KB

english, 2011

39

SPIE Proceedings [SPIE Defense and Security - Orlando, FL (Monday 12 April 2004)] Chemical and Biological Sensing V - Miniature photoacoustic chemical sensor using microelectromechanical structures

Pellegrino, Paul M., Polcawich, Ronald G., Firebaugh, Samara L., Gardner, Patrick J.

Year:

2004

Language:

english

File:

PDF, 667 KB

english, 2004

40

SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Baltimore, Maryland, USA (Monday 23 April 2012)] Micro- and Nanotechnology Sensors, Systems, and Applications IV - Biologically inspired, haltere, angular-rate sensors for micro-autonomous systems

Smith, G. L., George, Thomas, Islam, M. Saif, Bedair, S. S., Schuster, B. E., Dutta, Achyut, Nothwang, W. D., Pulskamp, J. S., Meyer, C. D., Polcawich, R. G.

Year:

2012

Language:

english

File:

PDF, 8.56 MB

english, 2012

41

Surface Micromachined Microelectromechancial Ohmic Series Switch Using Thin-Film Piezoelectric Actuators

Polcawich, Ronald G., Pulskamp, Jeffrey S., Judy, Daniel, Ranade, Prashant, Trolier-McKinstry, Susan, Dubey, Madan

Journal:

IEEE Transactions on Microwave Theory and Techniques

Year:

2007

Language:

english

File:

PDF, 1.90 MB

english, 2007

42

High-Performance Micromachined Inductors Tunable by Lead Zirconate Titanate Actuators

Bedair, Sarah S., Pulskamp, Jeffrey S., Meyer, Christopher D., Mirabelli, Manrico, Polcawich, Ronald G., Morgan, Brian

Journal:

IEEE Electron Device Letters

Year:

2012

Language:

english

File:

PDF, 420 KB

english, 2012

43

SPIE Proceedings [SPIE AeroSense 2003 - Orlando, FL (Monday 21 April 2003)] Chemical and Biological Sensing IV - Advancement of a MEMS photoacoustic chemical sensor

Pellegrino, Paul M., Polcawich, Ronald G., Gardner, Patrick J.

Year:

2003

Language:

english

File:

PDF, 897 KB

english, 2003

44

Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

Muralt, P., Polcawich, R. G., Trolier-McKinstry, S.

Journal:

Year:

2009

Language:

english

File:

PDF, 633 KB

english, 2009

45

[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Self-powered discharge-based wireless transmitter

Tin, S., Duggirala, R., Polcawich, R., Dubey, M., Lal, A.

Year:

2008

Language:

english

File:

PDF, 567 KB

english, 2008

46

[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Piezoelectric micro-scale mechanical computing system

Proie, Robert M., Pulskamp, Jeffrey S., Polcawich, Ronald G., Ivanov, Tony

Year:

2012

Language:

english

File:

PDF, 1.16 MB

english, 2012

47

[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Low loss micromachined lead zirconate titanate, contour mode resonator with 50Ω termination

Bedair, S. S., Pulskamp, J. S., Polcawich, R. G., Judy, D., Gillon, A., Bhave, S., Morgan, B.

Year:

2012

Language:

english

File:

PDF, 1.44 MB

english, 2012

48

[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Low-power 3-bit piezoelectric MEMS analog to digital converter

Proie, Robert, Pulskamp, Jeffrey S., Polcawich, Ronald G., Ivanov, Tony, Zaghloul, Mona

Year:

2011

Language:

english

File:

PDF, 1000 KB

english, 2011

49

Nano- and micro-electromechanical switch dynamics

Pulskamp, Jeffrey S, Proie, Robert M, Polcawich, Ronald G

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.67 MB

english, 2013

50

Total Ionizing Dose Effects in Piezoelectric MEMS Relays

Proie, Robert M., Polcawich, Ronald G., Cress, Cory D., Sanchez, Luz M., Grobicki, Alden D., Pulskamp, Jeffrey S., Roche, Nicolas J.-H.

Journal:

IEEE Transactions on Nuclear Science

Year:

2013

Language:

english

File:

PDF, 937 KB

english, 2013

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